SEM (EPMA WDS EDS) (NHMW)

JEOL JXA-8530F Field Emission Electron Probe Micro Analyzer

The JEOL JXA-8530F Hyperprobe is an electron probe micro analyzer with field emission cathode. The instrument is equipped with five WDS spectrometers and two EDS detectors. Elements from Be to U can routinely be analyzed in 0.01 wt% concentrations (in some cases even below 100 ppm) at a lateral resolution reaching into the sub-micrometer range. The integration of special image and analysis software packages combined with the fully automated state-of-the-art instrument offer the user unique analysis possibilities.

Vacuum system: oil rotary pumps, turbo-molecular pump, sputter ion pumps, differential pumping
Ultimate pressure: FE gun chamber ~ 10-8 Pa, sample chamber ~ 10-4 Pa
Electron gun: Schottky field emission electron gun
Accelerating voltage: 1 – 30 kV
Magnifications: ×40 – ×300,000 (WD 11 mm)
Probe current: 10 pA – 0.5 µA at 25 kV
Resolution: 3.0 nm at Acc. V. 30 kV, 10 pA, WD 8mm, SEI
Image output: 8-bit, up to 5120 × 3840 pixels
Specimen stage movement:  X 90 mm, Y 100mm, Z 7.5 mm
Specimen stage drive: minimum driving step size: X, Y: 0.02 µm/step, Z: 0.5 µm/step
Working distance: 11 mm
Integrated visible-light microscope: ½ inch CCD, reflected light, × 300, field of view 0.3×0.2 mm
Secondary electron (SE) detector: collector electrode, scintillator and photomultiplier tube
Backscattered electron (BSE) detector: Si P-N junction
Wavelength Dispersive X-ray Spectrometer (WDS) system:

• five linear focusing type spectrometers with automatic analyzing crystal exchange at any point
• X-ray take-off angle: 40°
• Xe-filled and gas-flow proportional counters
• seven analyzing crystals types: LDE1, LDE2, TAP, PETJ, PETH, LIF, LIFH
• detectable wavelength: 0.087 – 9.3 nm
• detectable/quantifiable element range: B – U

JEOL Energy Dispersive X-ray Spectrometer (EDS) system:

• type: 10 mm2 Si(Li) semiconductor, Peltier cooling
• detectable element range: B – U
• quantifiable element range: Na – U
• energy resolution: 138 eV or better (Fe, 5.9 KeV)

Computer automation: complete JEOL software package

• WDS/EDS qualitative, quantitative analysis software
• WDS/EDS line and mapping analysis software

Additional detector for EPMA:

• Bruker XFlash 6/10 energy dispersive detector